Historical
ISO 16700:2004
Microbeam analysis - Scanning electron microscopy - Guidelines for calibrating image magnification
ISO 16700:2004 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. This International Standard does not apply to the dedicated critical dimension measurement SEM.
CONTENT PROVIDER
International Organization for Standardization [iso]
International Organization for Standardization [iso]