Customer Service:
Mon - Fri: 8:30 am - 6 pm EST

Gas Distribution

Semiconductor Fabrication Standards cover the production process of semiconductors. Given the importance of clean rooms, these standards address gas distribution in that context, as well as the use and quality of water. Additionally, IEC 62258 provides information about semiconductor die products. Other topics of importance are included as well, such as EM immunity, examination of semiconductors, and aerospace-specific requirements.


ASTM F1376-92(2020)

Standard Guide for Metallurgical Analysis for Gas Distribution System Components

1.1 This guide covers corrosion resistant metallic alloys of the general class stainless steel, containing chromium, nickel, manganese, and silicon as major alloying additions and possibly molybdenum, that are qualified or specified for the materials of components used in high-purity gas supply systems for the semiconductor industry. This guide is primarily intended for testing to determine conformance to applicable composition and metallurgical specifications as stated in supplier product specifications or customer purchase specifications, or both. 1.2 Elements analyzed and reported in this guide are as follows: 1.2.1 The alloying additions chromium, nickel, and molybdenum (if specified in alloy, as in type 316L), 1.2.2 The minor elements and residuals manganese, silicon, copper, cobalt, and stabilizers such as titanium and columbium (niobium), if present, 1.2.3 Carbon, sulfur and phosphorus, 1.2.4 Nitrogen and oxygen gases, 1.2.5 Any additional minor element additions that may be made as part of the melting and casting practice, such as aluminum and calcium, 1.2.6 Available standard analytical and reporting techniques are described for these elements. 1.3 Metallurgical characteristics to be analyzed and reported are inclusion contents, grain structure, mechanical properties, and intergranular corrosion susceptibility. 1.4 Limitations: 1.4.1 This guide is limited to corrosion resistant metal alloys of the general class stated in the Scope. 1.4.2 The test methods cited in this guide are not intended to preclude the use of other generally accepted techniques of demonstrated equivalent or superior precision and bias. 1.4.3 Inclusion of testing and analysis procedures for any given element or metallurgical characteristic in this guide is not to be construed as being a requirement for incorporation of that element or metallurgical characteristic into any specifications. 1.5 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only. 1.6 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use. 1.7 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.


ASTM F1394-92(2020)

Standard Test Method for Determination of Particle Contribution from Gas Distribution System Valves

1.1 This test method covers gas distribution system components intended for installation into a high-purity gas distribution system. 1.1.1 This test method describes a procedure designed to draw statistically significant comparisons of particulate generation performance of valves tested under aggressive conditions. 1.1.2 This test method is not intended as a methodology for monitoring on-going particle performance once a particular valve has been tested. 1.2 This test method utilizes a condensation nucleus counter (CNC) applied to in-line gas valves typically used in semiconductor applications. It applies to automatic and manual valves of various types (such as diaphragms or bellows), 6.3 through 12.7-mm ( 1 / 4 through 1 / 2 -in.) size. For applications of this test method to larger valves, see the table in the appendix. 1.2.1 Valves larger than 12.7 mm ( 1 / 2 in.) can be tested by this methodology. The test stand must be sized accordingly. Components larger than 12.7 mm ( 1 / 2 in.) should be tested while maintaining a Reynolds number of 20 000 to 21 000. This is the Reynolds number for 12.7-mm ( 1 / 2 -in.) components tested at a velocity of 30.5 m/s (100 ft/s). 1.3 Limitations: 1.3.1 This test method is applicable to total particle count greater than the minimum detection limit (MDL) of the condensation nucleus particle counter and does not consider classifying data into various size ranges. 1.3.1.1 It is questionable whether significant data can be generated from nondynamic components (such as fittings and short lengths of tubing) to compare, with statistical significance, to the data generated from the spool piece. For this reason, this test method cannot reliably support comparisons between these types of components. 1.3.1.2 If detection or classification of particles, or both, in the size range of laser particle counter (LPC) technology is of interest, an LPC can be utilized for testing components. Flow rates, test times, sampling apparatus, and data analysis outlined in this test method do not apply for use with an LPC. Because of these variations, data from CNCs are not comparable to data from LPCs. 1.3.2 This test method specifies flow and mechanical stress conditions in excess of those considered typical. These conditions should not exceed those recommended by the manufacturer. Actual performance under normal operating conditions may vary. 1.3.3 The test method is limited to nitrogen or clean dry air. Performance with other gases may vary. 1.3.4 This test method is intended for use by operators who understand the use of the apparatus at a level equivalent to six months of experience. 1.3.5 The appropriate particle counter manufacturer's operating and maintenance manuals should be consulted when using this test method. 1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only. 1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 6 , Hazards. 1.6 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.


ASTM F1396-93(2020)

Standard Test Method for Determination of Oxygen Contribution by Gas Distribution System Components

1.1 This test method covers a procedure for testing components for oxygen contribution to ultra-high purity gas distribution systems at ambient temperature. In addition, this test method allows testing of the component at elevated ambient temperatures as high as 70 C. 1.2 This test method applies to in-line components containing electronics grade materials such as those used in a semiconductor gas distribution system. 1.3 Limitations: 1.3.1 This test method is limited by the sensitivity of current instrumentation, as well as the response time of the instrumentation. This test method is not intended to be used for test components larger than 12.7-mm ( 1 / 2 -in.) outside diameter nominal size. This test method could be applied to larger components; however, the stated volumetric flow rate may not provide adequate mixing to ensure a representative sample. Higher flow rates may improve the mixing but excessively dilute the sample. 1.3.2 This test method is written with the assumption that the operator understands the use of the apparatus at a level equivalent to six months of experience. 1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only. 1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 5 . 1.6 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.


ASTM F1397-93(2020)

Standard Test Method for Determination of Moisture Contribution by Gas Distribution System Components

1.1 This test method covers testing components for total moisture contribution to a gas distribution system at ambient temperature. In addition, the test method allows testing at elevated ambient temperatures as high as 70 C and of the component moisture capacity and recovery. 1.2 This test method applies to in-line components containing electronics grade materials such as those used in semiconductor gas distribution systems. 1.3 Limitations: 1.3.1 This test method is limited by the sensitivity of current instrumentation, as well as by the response time of the instrumentation. This test method is not intended to be used for test components larger than 12.7-mm ( 1 / 2 -in.) outside diameter nominal size. This test method could be applied to larger components; however, the stated volumetric flow rate may not provide adequate mixing to ensure a representative sample. Higher flow rates may improve the mixing but excessively dilute the sample. 1.3.2 This test method is written with the assumption that the operator understands the use of the apparatus at a level equivalent to six months of experience. 1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only. 1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 5 . 1.6 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.


ASTM F1398-93(2020)

Standard Test Method for Determination of Total Hydrocarbon Contribution by Gas Distribution System Components

1.1 This test method covers the testing of components for total hydrocarbons (THC) contribution to a gas distribution system at ambient temperature. In addition, this test method allows testing of the component at elevated ambient temperatures as high as 70 C. 1.2 This test method applies to in-line components containing electronics grade materials in the gaseous form, such as those used in semiconductor gas distribution systems. 1.3 Limitations: 1.3.1 This test method is limited by the sensitivity of current instrumentation, as well as by the response time of the instrumentation. This test method is not intended to be used for components larger than 12.7-mm ( 1 / 2 -in.) outside diameter nominal size. This test method could be applied to larger components; however, the stated volumetric flow rate may not provide adequate mixing to ensure a representative sample. Higher flow rates may improve the mixing but excessively dilute the sample. 1.3.2 Different instrumental methods (such as flame ionization detector (FID), mass spectrometer (MS)) will yield total hydrocarbon (THC) levels that are not comparable due to different sensitivities to different molecular species. Hydrocarbon contaminants of high-purity gas distribution systems can be subdivided into two general categories: ( 1 ) noncondensable hydrocarbons ( C 4 ), that are present due to difficulty of removal and relative atmospheric abundance, and ( 2 ) condensable hydrocarbons, that are often left behind on component surfaces as residues. Condensable hydrocarbons include pump oils, degreasing agents, and polishing compound vehicles. 1.3.3 Because of the tremendous disparity of hydrocarbon species, it is suggested that direct comparisons be made only among data gathered using the same detection method. 1.3.4 This test method is intended for use by operators who understand the use of the apparatus at a level equivalent to six months of experience. 1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only. 1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 5 . 1.6 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.


CGA V-7-2021

Standard Method of Determining Cylinder Valve Outlet Connections for Industrial Gas Mixtures

This standard applies to the selection of a suitable cylinder valve outlet connection for industrial, specialty, and semiconductor gas mixtures for pressures up to 3000 psi at 70 °F (20 680 kPa at 21.1 °C).2 It applies to cylinders filled for individual use, cylinders filled individually for the purpose of assembling into a cylinder bundle, and for all cylinder bundle manifold outlet connections.


ICC IFC-2021

2021 International Fire Code

The 2021 IFC contains regulations to safeguard life and property from fires and explosion hazards. Topics include general precautions, emergency planning and preparedness, fire department access and water supplies, automatic sprinkler systems, fire alarm systems, special hazards, and the storage and use of hazardous materials. Key changes to the IFC include: Requirements for Additive Manufacturing (3-D Printing) equipment and operations for both non-industrial and industrial applications are now provided. Flame propagation performance of permanently installed artificial combustible vegetation is required to be verified when exceeding certain heights located on roofs or in close proximity to buildings. Provisions for emergency responder communication were revised to reflect the expansion of such systems beyond radios and the need for increased performance of such systems. Sprinkler requirements for the storage, manufacture and sale of upholstered furniture and mattresses were updated and clarified. Part of this update is a new exception for single-story self-storage facilities accessed directly from the exterior. An automatic sprinkler system is now required for open parking garages exceeding a certain fire area threshold. The requirements for energy storage system (ESS) were further refined to reflect the variety of new technologies and applications (in building and standalone) and the need for proper commissioning and decommissioning of such systems. A new chapter was added that provides clarification and specific requirements for the storage of distilled spirits and wines in barrels and casks. The provisions for construction fire safety were reorganized and expanded with an emphasis on the owner’s responsibilities. The new language requires a site safety plan and designation of a site safety director.


ANSI Logo

As the voice of the U.S. standards and conformity assessment system, the American National Standards Institute (ANSI) empowers its members and constituents to strengthen the U.S. marketplace position in the global economy while helping to assure the safety and health of consumers and the protection of the environment.

CUSTOMER SERVICE
NEW YORK OFFICE
ANSI HEADQUARTERS