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146 items

 Most recent

ISO 14644-13:2017

Cleanrooms and associated controlled environments - Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications

CONTENT PROVIDER
International Organization for Standardization [iso]

 Most recent

ISO 14644-14:2016

Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration

CONTENT PROVIDER
International Organization for Standardization [iso]

 Most recent

ISO 14644-15:2017

Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration

CONTENT PROVIDER
International Organization for Standardization [iso]

 Most recent

ISO 14644-16:2019

Cleanrooms and associated controlled environments - Part 16: Energy efficiency in cleanrooms and separative devices

CONTENT PROVIDER
International Organization for Standardization [iso]

 Most recent

ISO 14644-17:2021

Cleanrooms and associated controlled environments - Part 17: Particle deposition rate applications

CONTENT PROVIDER
International Organization for Standardization [iso]

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