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DS/ISO14644-3:2019

Cleanrooms and associated controlled environments - Part 3: Test methods

This part of ISO 14644 provides test methods in support of the operation for cleanrooms and clean*zones to meet air cleanliness classifications and related controlled conditions. Tests for classification of*cleanliness are described in ISO 14644-1(classification of air cleanliness by particle concentration and*for macroparticles). Other related attribute levels can be determined using ISO 14644-8 (levels of air*cleanliness by chemicals), ISO 14644-9 (levels of surface cleanliness by particle concentration) and ISO*14644-10 (levels of surface cleanliness by chemical concentration). Performance tests are specified for*two types of cleanrooms and clean zones: those with unidirectional flow and those with nonunidirectional*flow, in three possible occupancy states: as-built, at-rest and operational. The test*methods, recommend test apparatus and test procedures for determining performance parameters are*provided. Where the test method is affected by the type of cleanroom or clean zone, alternative*procedures are suggested. For some of the tests, several different methods and apparatus are*recommended to accommodate different end- use considerations. Alternative methods not included in*this part of ISO 14644 may be used if based on agreement between customer and supplier. Alternative*methods do not necessarily provide equivalent measurements.


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