Historical
NFPA 318-2012
Standard for the Protection of Semiconductor Fabrication Facilities, 2012 Edition
Safeguard people and property in semiconductor plants and research facilities with the 2012 NFPA 318.Up-to-date with the latest references to NFPA® codes and other documents, NFPA 318: Standard for the Protection of Semiconductor Fabrication Facilities applies to semiconductor fabrication facilities and comparable R&D areas in which hazardous chemicals are used, stored, and handled -- containing a cleanroom or clean zone or both. Chapters cover core topics including:Fire protectionVentilation and exhaust systemsConstructionChemical storage and handlingHazardous gas cylinder storage and distributionBulk silane systemsProduction and support equipmentEmergency control stationGeneral safety precautionsMeans of egressThree annexes provide helpful explanatory material; additional facts about seismic protection, and production and support equipment; and informational references. Facility engineers, owners, and managers, plant safety directors, safety trainers, risk insurers, and AHJs need the latest requirements for semiconductor fabrication facilities based on industry needs, new technology, and recent experience. (Softbound, Approx. 28 pp., 2012)
Content Provider
National Fire Protection Association [nfpa]
