ASTM F1367-98(2003)

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Standard Specification for Chromium Sputtering Targets for Thin Film Applications

1.1 This specification covers sputtering targets fabricated from chromium metal.

1.2 This specification sets purity grade levels, physical attributes, analytical methods and packaging requirements.

1.3 The values stated in SI units are regarded as standard.

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Standard Specification for Chromium Sputtering Targets for Thin Film Applications

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ASTM F1367-98(2003)

Standard Specification for Chromium Sputtering Targets for Thin Film Applications

Are the documents at the ANSI Webstore in electronic Adobe Acrobat PDF format only?

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