IEC 62047-1 Ed. 1.0 b:2005

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Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions

This part of IEC 62047 defines terms for micro-electromechanical devices including the process of production of such devices.

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International Electrotechnical Commission [iec]

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Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions

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Historical

IEC 62047-1 Ed. 1.0 b:2005

Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions

Are the documents at the ANSI Webstore in electronic Adobe Acrobat PDF format only?

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