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DIN EN ISO 25178-603:2014
Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments (ISO 25178-603:2013); German version EN ISO 25178-603:2013
This part of ISO 25178 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.
Deutsches Institut für Normung [din]