Historical
DS/CEN ISO/TS 80004-8:2015
Nanotechnologies - Vocabulary - Part 8: Nanomanufacturing processes
This Technical Specification gives terms and definitions related to nanomanufacturing processes in the*field of nanotechnologies. It forms one part of multi-part terminology and definitions documentation*covering the different aspects of nanotechnologies.*All the process terms in this document are relevant to nanomanufacturing. Many of the listed processes*are not exclusively relevant to the nanoscale. Depending on controllable conditions, such processes may*result in material features at the nanoscale or, alternatively, larger scales.*There are many other terms that name tools, components, materials, systems control methods or*metrology methods associated with nanomanufacturing that are beyond the scope of this document.
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Danish Standards [ds]
