Most recent
DS/ISO 14644-12:2018
Cleanrooms and associated controlled environments - Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration
This document covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles.*For monitoring purposes, only populations of particles with a lower size limit of 0.1 microns (100 nm) or less ? "nanoscale" ? are considered.*The monitoring given in this document is for use mainly in "operational" states.*NOTE 1 û For the purposes of this document, reference is made to "nanoscale particles", which means all nano-objects having one (nanoplate), two (nanofibre) or three (nanoparticle) dimensions in the nanoscale.*NOTE 2 û As a consequence, the specifications for monitoring air cleanliness by nanoscale particle concentration of the cleanroom in operational state also considers process specifics, e.g., used equipment, personnel behaviour, etc.*NOTE 3 û Health and safety considerations are excluded from this document.
Danish Standards [ds]