Most recent

IEC/TS 62607-6-5 Ed. 1.0 en:2022

Nanomanufacturing - Key control characteristics - Part 6-5: Graphene-based materials - Contact and sheet resistance: transmission line measurement


IEC TS 62607-6-5:2022(E) establishes a standardized method to determine the key control characteristics 

     
  • contact resistance, and
  •  
  • sheet resistance
  •  
 for graphene-based materials and other two-dimensional materials by a  
     
  • transmission line measurement.
  •  
 The method uses test structures applied to the 2D material by photolithographic methods consisting of several metal electrodes with increasing spacing between the electrodes. By a measurement of the voltage drop between different pairs of electrodes, sheet resistance and contact resistance can be calculated.  
     
  • The method can be applied to any other two-dimensional materials which are subject to electrical metal contact on top of the materials.
  •  
  • The method provides accurate and reproducible results, if the electrical contact formed between the two-dimensional material and the metal electrodes provides ohmic contact property.
  •  


CONTENT PROVIDER
International Electrotechnical Commission [iec]

Document History
We have no document history for this standard.
Included in Packages
This standard is not included in any packages.
Amendments & Corrections
We have no amendments or corrections for this standard.