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ONORM EN ISO 14644-15:2018
Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration (ISO 14644-15:2017)
This document provides requirements and guidelines for the assessment of airborne chemical purity of equipment and materials that are intended for use in cleanrooms and associated Cleanroom areas, with the ISO standard for Purity classes are based on the chemical concentration (see ISO 14644-8). The following areas are not covered by this document:-health and safety requirements; -Compatibility with cleaning products and techniques; -Cleanability; -Bio-contamination; -specific requirements on equipment and materials for processes and products; -Construction details of the equipment.
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Austrian Standards Institute [on]
