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ONORM EN ISO 14644-17:2021
Cleanrooms and associated controlled environments - Part 17: Particle deposition rate applications (ISO 14644-17:2021)
This document contains instructions for the evaluation and application of the measurement results of the particle deposition rate on one or more sensitive surfaces in a clean room within the framework of a program for contamination control. It also includes instructions on how to influence the particle deposition rate and reduce the risk of particulate contamination on sensitive surfaces. This document describes how users of a cleanroom can set limit values with the help of measurements of the particle deposition rate, which apply to macroparticles on sensitive surfaces. It also includes a method of risk assessment by which an acceptable risk of particle deposition on sensitive surfaces in a clean room can be determined and, if this is not achieved, procedures by which the particle deposition rate can be reduced. An alternative to the particle deposition rate is the particulate turbidity rate, with which the increase ...
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Austrian Standards Institute [on]
