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ONORM EN ISO 14644-3:2020
Cleanrooms and associated controlled environments - Part 3: Test methods (ISO 14644-3:2019, corrected version 2020-06)
This document includes test procedures to support the operation of cleanrooms and pure areas with a view to complying with air purity classifications, other purity attributes and related regulated conditions. Performance tests are defined for two types of cleanrooms and pure areas, those with low-turbulence displacement currents and those with turbulent mixed currents. Three operating states are considered: deployment, idle, manufacturing. The test methods, recommended test equipment and test methods for determining performance parameters shall be indicated. Alternative methods are proposed in places where the test procedure is influenced by the nature of the cleanroom or pure area. Several different procedures and devices are recommended for some tests, so that different types of use can be taken into account. Insofar as agreed between the customer and the supplier, alternative, nic ...
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Austrian Standards Institute [on]
