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SS-EN ISO 14644-9:2012

Cleanrooms and associated controlled environments - Part 9: Classification of surface cleanliness by particle concentration (ISO 14644-9:2012) (Swedish Standard)


ISO 14644-9:2012 establishes the classification of cleanliness levels on solid surfaces by particle concentration in cleanrooms and associated controlled environment applications. Recommendations on testing and measuring methods, as well as information about surface characteristics are also givenSO 14644-9:2012 applies to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environments, tools, equipment and products. The surface particle cleanliness (SPC) classification is limited to particles between 0,05 µm and 500 µm.he following issues are not considered: equirements for the cleanliness and suitability of surfaces for specific processes; rocedures for the cleaning of surfaces; aterial characteristics; eferences to interactive bonding forces or generation processes that are usually time-dependent and process-dependent; election and use of statistical methods for classification and testing; ther characteristics of particles, such as electrostatic charge, ionic charges, microbiological state, etc.


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Swedish Standards Institute [sis]

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